Important Data Statistics
Main Deposition Materials
Deposition Temperature
Growth Rate
Process parameters & Properties
Using GPT as an analytical tool, we extracted data from 15512 articles, including 7 process parameters and 10 properties:
- Material
- Precursor
- Coreactant
- Deposited temperature
- Substrate
- Grouth rate (GPC)
- Pulse and purge time
- Dielectric constant
- Resistivity
- Mobility
- Crystal structure
- Barrier layer
- WVTR
- Residual stress
- Bending radius
- Preparation method
- Other informations of source article/journal